@InProceedings{UedaSilvPichReut:2018:HiTePl,
author = "Ueda, M{\'a}rio and Silva, Carla da and Pichon, L and Reuther,
H",
affiliation = "{Instituto Nacional de Pesquisas Espaciais (INPE)} and {Instituto
Nacional de Pesquisas Espaciais (INPE)}",
title = "High temperature Plasma Immersion Ion Implamtation (and
Deposition) using hollow cathode discharges in small diameter
tubes",
booktitle = "Proceedings...",
year = "2018",
pages = "390--391",
organization = "Europhysics Conference on the Atomic and Molecular Physics of
Ionized Gases, 16.",
keywords = "High temperature PIII, hollow cathode discharge, small diameter
tube.",
conference-location = "Glasgow, Scotland",
conference-year = "2018",
label = "lattes: 9226460532838417 1 UedaSilvPichReut:2018:HiTePl",
language = "en",
urlaccessdate = "27 abr. 2024"
}